Gas List
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Available Gases

No.

Name

Chemical Formula

CAS No.

Other Names

251

Sulfur dioxide

SO2
7446-09-5
252

Sulfur chloride

Cl2S2
10025-67-9
253

Sulfur hexafluoride

SF6
2551-62-4
254

Tantalum fluoride

TaF5
7783-71-3
255

Tetraethyl orthosilicate

SiC8H20O4
78-10-4
TEOS
256

Tetrakis(dimethylamino)titanium

C8H24N4Ti
3275-24-9
TDMAT
257

Tetramethylsilane

C4H12Si
75-76-3
4MS
258

Tert-Butyl acrylate

C7H12O2
1663-39-4
TBA
259

Tert-butylbenzene

C10H14
98-06-6
260

Tert-Butyl Methyl Ether

C5H12O
1634-04-4
MTBE
261

Tetrafluoroethylene

C2F4
116-14-3
262

Tetrahydrofuran

C4H8O
109-99-9
THF
263

Tetrahydrothiophene

C4H8S
110-01-0
THT
264

Thinner

MEK 60% Heptane 30% Toluene 1.8%
N/A
265

Thionyl chloride

SOCl2
7719-09-7
266

Tin tetrachloride

SnCl4
7646-78-8
267

Titanium(IV) fluoride

TiF4
7783-63-3
268

Titanium tetrachloride

TiCl4
7550-45-0
269

Toluene

C7H8
108-88-3
270

Trichloroethane

C2H3Cl3
71-55-6
TCA, Methylchloroform (R140a)
271

Trichloroethylene

C2HCl3
79-01-6
TCE
272

Trichlorosilane

HCl3Si
10025-78-2
TCS
273

Triethylamine

C6H15N
121-44-8
TEA
274

Trifluoroacetic acid

C2HF3O2
76-05-1
TFA
275

1,1,1,4,4,4-Hexafluoro-2-butene

C4H2F6
N/A
276

3,3,3-Trifluoro-2-(trifluoromethyl)propene

C4H2F6 - Isomer(HFIB)
382-10-5
277

Triethylborane

C6H15B
97-94-9
Borane, triethyl-, Triethylboron, (C2H5)3B, Triethylborine, Borethyl
278

Trimethylamine

C3H9N
75-50-3
TMA
279

1,2,4-Trimethylbenzene

C9H12
95-63-6
TMB
280

Trimethyl borate

C3H9BO3
121-43-7
TMB
281

Trimethyl Orthoformate

C4H10O3
149-73-5
SAP01
282

Trimethylsilane

C3H10Si
993-07-7
TMS
283

Trisilane

Si3H8
7783-26-8
284

Tungsten hexafluoride

WF6
7783-82-6
285

Vinyl acetate

C4H6O2
108-05-4
286

Vinyl chloride

C2H3Cl
75-01-4
287

4-Vinyl-1-cyclohexene

C8H12
100-40-3
288

Mixed-Xylene

C8H10
1330-20-7
289

o-Xylene

C8H10
95-47-6
290

p-Xylene

C8H10
106-42-3